JPH03106736U - - Google Patents
Info
- Publication number
- JPH03106736U JPH03106736U JP1581890U JP1581890U JPH03106736U JP H03106736 U JPH03106736 U JP H03106736U JP 1581890 U JP1581890 U JP 1581890U JP 1581890 U JP1581890 U JP 1581890U JP H03106736 U JPH03106736 U JP H03106736U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- pressure
- dielectric line
- pressure detector
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 235000002918 Fraxinus excelsior Nutrition 0.000 description 2
- 239000002956 ash Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581890U JPH03106736U (en]) | 1990-02-19 | 1990-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581890U JPH03106736U (en]) | 1990-02-19 | 1990-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106736U true JPH03106736U (en]) | 1991-11-05 |
Family
ID=31519108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1581890U Pending JPH03106736U (en]) | 1990-02-19 | 1990-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106736U (en]) |
-
1990
- 1990-02-19 JP JP1581890U patent/JPH03106736U/ja active Pending
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